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G. -S. Lee, J. -G. Park, S. -P. Choi, C. -H. Shin, Y. -B. Sun, Y. -S. Kwak, C. -K. Shim, W. L. Smith, and S. Hahn

 

Effects of Silicon Ion Implantation upon Thin Gate Oxide Integrity

 

Volume 262 (Symposium E – Defect Engineering in Semiconductor Growth, Processing and Device Technology)