2001-2005 [2005.04.01] Slip formation in 300-mm polished and epitaxial silicon wafers annealed by rapid thermal annealing
2019.06.26 15:41
Kyu-Chul Cho, Hyeong-Tag Jeon and Jea-Gun Park
Slip formation in 300-mm polished and epitaxial silicon wafers annealed by rapid thermal annealing