2001-2005 [2005.11.09] Agglomerated Large Particles under Various Slurry Preparation Conditions and Their Influence on Shallow Trench Isolation Chemical Mechanical Polishing
2019.06.26 15:51
Dae-Hyeong Kim, Hyun-Goo Kang, Sang-Kyun Kim, Ungyu Paik and Jea-Gun Park
Agglomerated Large Particles under Various Slurry Preparation Conditions and Their Influence on Shallow Trench Isolation Chemical Mechanical Polishing