메뉴 건너뛰기

Hao Cui, Jong-Young Cho, Jin-Hyung Park, Hyung Soon Park and Jea-Gun Park

 

Chemical Mechanical Planarization Mechanism for Nitrogen-Doped Polycrystalline Ge2Sb2Te5 Film Using Nitric Acidic Slurry Added with Hydrogen Peroxide

 

J. Electrochem. Soc. 158 (2011) H666