2001-2005 [2004.10.__] Determination of the distribution and morphology of silicon islands in the buried oxide layer of SOI wafers by using a focused ion beam and transmission electron microscope
2019.05.02 18:09
T.-H. Shim, S.-D. Kim, S.-G. Kim and J.-G. Park
Determination of the distribution and morphology of silicon islands in the buried oxide layer of SOI wafers by using a focused ion beam and transmission electron microscope