2001-2005 [2003.03.15] Effects of the physical characteristics of cerium oxide on plasma-enhanced tetraethylorthosiliate removal rate of chemical mechanical polishing for shallow trench isolation
2019.04.20 15:04
Sang-Kyun Kim, Ungyu Paik, Seong-Geun Oh, Yong-Kook Park, Takeo Katoh and Jea-Gun Park
Effects of the physical characteristics of cerium oxide on plasma-enhanced tetraethylorthosiliate removal rate of chemical mechanical polishing for shallow trench isolation