2001-2005 [2002.04.15] The nanotopography effect of improved single-side-polished wafer on oxide chemical mechanical polishing
2019.04.08 21:39
Takeo Katoh, Jea-Gun Park, Won-Mo Lee, Hyeongtag Jeon, Un-Gyu Paik and Hisaaki Suga
The nanotopography effect of improved single-side-polished wafer on oxide chemical mechanical polishing