2001-2005 [2002.07.01] Spectral Analysis Method for Nanotopography Impact on Pad and Removal Depth Dependency in Oxide CMP
2019.04.08 21:43
Jea-Gun Park, Takeo Katoh, Hyung-Chul Yoo and Un-Gyu Paik
Spectral Analysis Method for Nanotopography Impact on Pad and Removal Depth Dependency in Oxide CMP
Proceeding of the Fifth International Symposium on CMP, 201st Meeting of ECS, 0392