2001-2005 [2002.07.11] The effect of agglomerated particle size on the chemical mechanical planarization for shallow trench isolation
2019.04.08 21:58
S. -K. Kim, P. -W. Yoon, U. Paik, T. Katoh and J. -G. Park
The effect of agglomerated particle size on the chemical mechanical planarization for shallow trench isolation