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2001-2005 [2005.12.02] Investigation of multilayer structural changes in phase and amplitude-defects correction process

2019.06.26 15:53

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Seung Yoon Lee, Tae Geun Kim, Jae Gun Park, Joo Kyoung Song, Oh Hyun Kim, Chul-Woong Yong and Jinho Ahn

 

Investigation of multilayer structural changes in phase and amplitude-defects correction process

 

J. Vac. Sci. Technol. B 23 (2005) 2866

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