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박재근, 백운규

 

PoRAM 최근 연구 동향 및 향후 개발 방향

 

물리학과 첨단기술 9월호 (2005) 26

번호 제목
132 [2006.03.__] Effect of Calcination Time on the Physical Properties of Synthesized Ceria Particles for the Shallow Trench Isolation Chemical Mechanical Planarization Process file
131 [2006.02.01] Atomic Force Microscopy Study of the Role of Molecular Weight of Poly(acrylic acid) in Chemical Mechanical Planarization for Shallow Trench Isolation file
130 [2005.12.__] Comparison of phonon-limited electron mobility in strained Si grown on silicon on insulator (sSOI) and SiGe on insulator (SGOI) file
129 [2005.12.08] The Effect of Cerium Precursor Agglomeration on the Synthesis of Ceria Particles and Its Influence on Shallow Trench Isolation Chemical Mechanical Polishing Performance file
128 [2005.12.02] Investigation of multilayer structural changes in phase and amplitude-defects correction process file
127 [2005.11.09] Agglomerated Large Particles under Various Slurry Preparation Conditions and Their Influence on Shallow Trench Isolation Chemical Mechanical Polishing file
126 [2005.10.27] Development of Dynamic Interface for Sensor
125 [2005.10.15] Influences of pH and concentration of Surfactant on the Electrokinetic Behavior of a Nano-Ceria Slurry in shallow Trench Isolation Chemical Mechanical Polishing file
124 [2005.09.10] Dependency of Phonon-limited Electron Mobility on Si Thickness in strained SGOI  (Silicon Germanium on Insulator) n-MOSFET file
123 [2005.09.01] 차세대 비휘발성 메모리 소자 file
» [2005.09.01] PoRAM 최근 연구 동향 및 향후 개발 방향 file
121 [2005.07.08] Dependence of pH, Molecular Weight, and Concentration of Surfactant in Ceria Slurry on Saturated Nitride Removal Rate in Shallow Trench Isolation Chemical Mechanical Polishing file
120 [2005.06.01] Cu-CMP에서 Alanine이 Cu와 TaN의 선택비에 미치는 영향 file
119 [2005.04.28] Design of Compact PIFA for Mobile Communication Handset
118 [2005.04.28] Automatic System and Productivity Elevation