2001-2005 [2004.03.01] Effects of Grain Size and Abrasive Size of Polycrystalline Nano-partical Ceria Slurry on Shallow Trench Isolation Chemical Mechanical Polishing
2019.05.02 17:55
Hyun-Goo Kang, Takeo Katoh, Sung-Jun Kim, Ungyu Paik, Hyung-Soon Park and Jea-Gun Park
Effects of Grain Size and Abrasive Size of Polycrystalline Nano-partical Ceria Slurry on Shallow Trench Isolation Chemical Mechanical Polishing