2001-2005 [2004.04.15] Effects of abrasive size and surfactant in nano ceria slurry for shallow trench isolation
2019.05.02 17:56
Won-Mo Lee, Takeo Katoh, Hyun-Goo Kang and Jea-Gun Park
Effects of abrasive size and surfactant in nano ceria slurry for shallow trench isolation