2001-2005 [2004.11.01] A reverse selectivity ceria slurry for the damascene gate chemical mechanical planarization process
2019.05.02 18:15
Sang-Kyun Kim, Hyung-Min Sohn, Ungyu Paik, Takeo Katoh and Jea-Gun Park
A reverse selectivity ceria slurry for the damascene gate chemical mechanical planarization process