2001-2005 [2002.01.15] Effects of film type and nanotopography of wafers on oxide CMP characteristics
2019.04.08 20:36
T. Katoh, B. G. Ko, J. H. Park, H. C. Yoo, J. G. Park, U. G. Paik
Effects of film type and nanotopography of wafers on oxide CMP characteristics
J. Korean Phys. Soc. 40 (2002) 180