2001-2005 [2002.07.01] Nanotopography Effect of Improved Single-Side-Polished Wafer on Oxide CMP
2019.04.08 21:41
Takeo Katoh, Jea-Gun Park, Jin-Hyung Park and Un-Gyu Paik
Nanotopography Effect of Improved Single-Side-Polished Wafer on Oxide CMP
Proceeding of the Fifth International Symposium on CMP, 201st Meeting of ECS, 0391