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2001-2005 [2001.12.18] Effect of Film Type and Wafer Shape on Oxide CMP Characteristics

2019.04.02 20:23

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J. G. Park, H. I. Jung, T. Katoh, U. G. Paik, H. Jeon

 

Effect of Film Type and Wafer Shape on Oxide CMP Characteristics

 

J. Korean Phys. Soc. 39 (2001) S296

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» [2001.12.18] Effect of Film Type and Wafer Shape on Oxide CMP Characteristics file
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