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K. -C. Cho, J. -G. Park, Y. -S. Kwak, D. -J. Lee, D. -S. Lim, C-K. Shin, S. Hahn, W. L. Smith

 

Effects of Metallic Impurities upon thin Gate Oxide Integrity and Related Bulk Properties in CZ Si

 

The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2, pp. 223