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1990-1995 [1994..] Comparison of Oxide Breakdown Mechanisms Due to D-defects and Oxygen Precipitates

2019.03.31 11:14

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J. G. Park, S. Ushio, H. Takeno, K. -C. Cho, J. -K, Kim, and G. A. Rozgonyi

Comparison of Oxide Breakdown Mechanisms Due to D-defects and Oxygen Precipitates

Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices, pp. 53

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