2001-2005 [2004.07.09] Nanotopography Simulation of Shallow Trench Isolation Chemical Mechanical Polishing using Nano Ceria Slurry
2019.05.02 18:01
Nanotopography Simulation of Shallow Trench Isolation Chemical Mechanical Polishing using Nano Ceria Slurry
한국전기전자재료학회 2004년도 하계 학술대회 논문집