2001-2005 [2004.08.01] Achievement of nano-scale SiGe layer with discrete Ge mole fraction profile using batch-type HVCVD
2019.05.02 18:02
G.-S. Lee, T.-H. Shim and J.-G. Park
Achievement of nano-scale SiGe layer with discrete Ge mole fraction profile using batch-type HVCVD