2016-2020 [2019.05.01] Surface-tensile-stress induced polishing-voids in cross-point phase-change-memory cells: corrosion mechanism and solution
2021.08.12 14:24
Surface-tensile-stress induced polishing-voids in cross-point phase-change-memory cells: corrosion mechanism and solution
Soo-Bum Kim, Hao Cui, Jong-Young Cho, Eun-Bin Seo, Sang-Su Yoon, Young-Hye Son, Gi-Ppeum Jeong, Jae-Young Bae, Jin-Hyung Park and Jea-Gun Park