2001-2005 [2002.07.01] The stability of nano fumed silica particles and its influence on chemical mechanical planarization for interlayer dielectrics
2019.04.08 21:45
Jongphil Kim, Ungyu Paik, Yeon-Gil Jung, Takeo Katoh and Jea-Gun Park
The stability of nano fumed silica particles and its influence on chemical mechanical planarization for interlayer dielectrics