2001-2005 [2003.03.15] Effects of abrasive morphology and surfactant concentration on polishing rate of ceria slurry
2019.04.20 15:03
Takeo Katoh, Hyun-Goo Kang, Ungyu Paik and Jea-Gun Park
Effects of abrasive morphology and surfactant concentration on polishing rate of ceria slurry