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2016-2020 [2016.05.01] Influence of pulsed bias frequency on the etching of magnetic tunneling junction materials

2021.08.12 14:08

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Influence of pulsed bias frequency on the etching of magnetic tunneling junction materials

 

Kyung Chae Yang, Sung Woo Park, Min Hwan Jeon, Viet Phuong Pham, Du Yeong Lee, Tae Hun Shim, Jea Gun Park and Geun Young Yeom

 

Vacuum 127 (2016) 82

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» [2016.05.01] Influence of pulsed bias frequency on the etching of magnetic tunneling junction materials file
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