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2001-2005 [2001.12.18] Effects of pattern density on CMP removal rate and uniformity

2019.04.08 20:31

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B. G. Ko, H. C. Yoo, J. G. Park, U. G. Paik

 

Effects of pattern density on CMP removal rate and uniformity

 

J. Korean Phys. Soc. 39 (2001) S318

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