2011-2015 [2013.10.01] Environmentally Clean Slurry using Nano-TiO2-abrasive Mixed with Oxidizer H2O2 for Ruthenium-film Chemical Mechanical Planarization
2021.08.12 13:50
Environmentally Clean Slurry using Nano-TiO2-abrasive Mixed with Oxidizer H2O2 for Ruthenium-film Chemical Mechanical Planarization
Hao Cui, Jin-Hyung Park and Jea-Gun Park