2001-2005 [2001.04.01] Nature of surface and bulk defect induced by low dose oxygen implantation in separation by implanted oxygen wafers
2019.04.02 20:20
Jea-Gun Park, Suk-Goo Kim, Gon-Sub Lee and Tae-Hun Shim
Nature of surface and bulk defect induced by low dose oxygen implantation in separation by implanted oxygen wafers