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Hao Cui, Jin-Hyung Park and Jea-Gun Park

 

Corrosion Inhibitors in Sodium Periodate Slurry for Chemical Mechanical Planarization of Ruthenium Film

 

ECS J. Solid State Sci. Technol. 2 (2013) P71

번호 제목
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» [2013.01.03] Corrosion Inhibitors in Sodium Periodate Slurry for Chemical Mechanical Planarization of Ruthenium Film file
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