2011-2015 [2013.02.15] Dependence of Nickel Gettering on Crystalline Nature in As-grown Czochralski Silicon Wafer
2021.08.12 13:37
In-Ji Lee, Ungyu Paik and Jea-Gun Park
Dependence of Nickel Gettering on Crystalline Nature in As-grown Czochralski Silicon Wafer