※ Photo

  ※ Sputter

         Contact Aligner

         12" Multi Chamber Cluster Sputtering System

         Sputter

  ※ Evaporator

  ※ RTA

         Thermal Evaporator

         Rapid Thermal Annealer

  ※ Furnace

  ※ Oven

         12" Magnetic Vacuum Annealing Oven

         Furnace (Oxidation)

         Box Furnace

         Vacuum Oven

  ※ CMP

  ※ Centrifuge

         CMP Polisher I

         CMP Polisher II

         High Speed Centrifuge

※ 측정/분석

        Vibrating Sample Magnetometer

         4-point Probe

         Ellipsometer

         ELS

         UV-Vis-NIR Spectrophotometer

         Focused Ion Beam