※ Photo

  ※ Sputter

         Contact Aligner

         12" Multi Chamber Cluster Sputtering System

         Sputter

  ※ Furnace

  ※ Oven

         12" Magnetic Vacuum Annealing Oven

         Furnace (Oxidation)

         Box Furnace

         12" Magnetic Vacuum Annealing Oven

         Furnace (Oxidation)

         Box Furnace        

           Vacuum Oven

  ※ CMP

  ※ Centrifuge

         CMP Polisher I

         CMP Polisher II

         High Speed Centrifuge