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2011-2015 [2014.02.28] Characterization of nano-scale strained silicon-on-insulator substrates by multiwavelength high resolution micro-raman and optical reflectance

2021.08.12 13:51

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Characterization of nano-scale strained silicon-on-insulator substrates by multiwavelength high resolution micro-raman and optical reflectance

 

Tae-Hun Shim, Duyeong Lee, Tae-Hyun Kim and Jea-Gun Park

 

J. Cera. Process. Research 15 (2014) 53

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