1990-1995 [1993.07.01] Effects of Metallic Impurities upon Thin Gate Oxide Integrity and Related Bulk Properties in CZ Si
2019.03.31 11:07
K. -C. Cho, J. -G. Park, Y. -S. Kwak, D. -J. Lee, D. -S. Lim, C-K. Shin, S. Hahn, W. L. Smith
Effects of Metallic Impurities upon thin Gate Oxide Integrity and Related Bulk Properties in CZ Si
The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2, pp. 223