2011-2015 [2013.01.03] Corrosion Inhibitors in Sodium Periodate Slurry for Chemical Mechanical Planarization of Ruthenium Film
2021.03.07 13:31
Hao Cui, Jin-Hyung Park and Jea-Gun Park
Corrosion Inhibitors in Sodium Periodate Slurry for Chemical Mechanical Planarization of Ruthenium Film