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2001-2005 [2002.01.15] Effects of film type and nanotopography of wafers on oxide CMP characteristics

2019.04.08 20:36

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T. Katoh, B. G. Ko, J. H. Park, H. C. Yoo, J. G. Park, U. G. Paik

 

Effects of film type and nanotopography of wafers on oxide CMP characteristics

 

J. Korean Phys. Soc. 40 (2002) 180

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