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2001-2005 [2003.03.15] Effects of the physical characteristics of cerium oxide on plasma-enhanced tetraethylorthosiliate removal rate of chemical mechanical polishing for shallow trench isolation

2019.04.20 15:04

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Sang-Kyun Kim, Ungyu Paik, Seong-Geun Oh, Yong-Kook Park, Takeo Katoh and Jea-Gun Park

 

Effects of the physical characteristics of cerium oxide on plasma-enhanced tetraethylorthosiliate removal rate of chemical mechanical polishing for shallow trench isolation

 

Jpn. J. Appl. Phys. 42 (2003) 1227

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