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2006-2010 [2006.02.01] Atomic Force Microscopy Study of the Role of Molecular Weight of Poly(acrylic acid) in Chemical Mechanical Planarization for Shallow Trench Isolation

2020.02.20 10:22

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Chae-Woong Cho, Sang-Kyun Kim, Ungyu Paik, Jea-Gun Park and W. M. Sigmund

 

Atomic Force Microscopy Study of the Role of Molecular Weight of Poly(acrylic acid) in Chemical Mechanical Planarization for Shallow Trench Isolation

 

J. Mater. Res. 21 (2006) 473

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