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2006-2010 [2006.12.15] The Effect of the physico-chemical properties of cellulosic polymers on the Si wafer polishing process

2021.02.07 20:41

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Sang-Kyun Kim, Ye-Hwan Kim, Ungyu Paik, Takeo Katoh and Jea-Gun Park

 

The Effect of the physico-chemical properties of cellulosic polymers on the Si wafer polishing process

 

J. Electroceramics 17 (2006) 835

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