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[2021.05.05] Dishing-free chemical mechanical planarization for copper films

2022.01.06 15:04

Administrator 조회 수:446

Dishing-free chemical mechanical planarization for copper films

 

 
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363 [2022.06.07] Enhancement of electrical characteristics and reliability of CuGeS2/GeS2-based super-linear-threshold-switching device by insertion of TiN liner file
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356 [2021.12.24] Perpendicular-spin-transfer-torque magnetic-tunnel-junction neuron for spiking neural networks depending on the nanoscale grain size of the MgO tunnelling barrier file
355 [2021.12.04] Scavenger with Protonated Phosphite Ions for Incredible Nanoscale ZrO2-Abrasive Dispersant Stability Enhancement and Related Tungsten-Film Surface Chemical–Mechanical Planarization file
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353 [2021.11.17] Fenton Reaction for Enhancing Polishing Rate and Protonated Amine Functional Group Polymer for Inhibiting Corrosion in Ge1Sb4Te5 Film Surface Chemical-Mechanical-Planarization file
352 [2021.11.04] Bidirectional Electric-Induced Conductance Based on GeTe/Sb2Te3 Interfacial Phase Change Memory for Neuro-Inspired Computing file
351 [2021.10.12] Sputter-grown GeTe/Sb2Te3 superlattice interfacial phase change memory for low power and multi-level-cell operation file
350 [2021.09.06] Super fine cerium hydroxide abrasives for SiO2 film chemical mechanical planarization performing scratch free file
349 [2021.06.18] Enhanced performance of polymer solar cells using selective silver nanocrystal morphology file
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