2016-2020 [2020.05.18] Interfacial Chemical and Mechanical Reactions between Tungsten-Film and Nano-Scale Colloidal Zirconia Abrasives for Chemical-Mechanical-Planarization
2021.08.12 14:29
Interfacial Chemical and Mechanical Reactions between Tungsten-Film and Nano-Scale Colloidal Zirconia Abrasives for Chemical-Mechanical-Planarization
Eun-Bin Seo, Jae-Young Bae, Sung-In Kim, Han-Eol Choi, Young-Hye Son, Sang-Su Yun, Jin-Hyung Park and Jea-Gun Park