2006-2010 [2006.02.01] Atomic Force Microscopy Study of the Role of Molecular Weight of Poly(acrylic acid) in Chemical Mechanical Planarization for Shallow Trench Isolation
2020.02.20 10:22
Chae-Woong Cho, Sang-Kyun Kim, Ungyu Paik, Jea-Gun Park and W. M. Sigmund
Atomic Force Microscopy Study of the Role of Molecular Weight of Poly(acrylic acid) in Chemical Mechanical Planarization for Shallow Trench Isolation