1990-1995 [1992.__.__] Effects of Silicon Ion Implantation upon Thin Gate Oxide Integrity
2019.03.31 10:57
G. -S. Lee, J. -G. Park, S. -P. Choi, C. -H. Shin, Y. -B. Sun, Y. -S. Kwak, C. -K. Shim, W. L. Smith, and S. Hahn
Effects of Silicon Ion Implantation upon Thin Gate Oxide Integrity