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1990-1995 [1993.07.01] Effects of Metallic Impurities upon Thin Gate Oxide Integrity and Related Bulk Properties in CZ Si

2019.03.31 11:07

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K. -C. Cho, J. -G. Park, Y. -S. Kwak, D. -J. Lee, D. -S. Lim, C-K. Shin, S. Hahn, W. L. Smith

 

Effects of Metallic Impurities upon thin Gate Oxide Integrity and Related Bulk Properties in CZ Si

 

The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2, pp. 223

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» [1993.07.01] Effects of Metallic Impurities upon Thin Gate Oxide Integrity and Related Bulk Properties in CZ Si
4 [1993.07.01] Effects of D-Defects in CZ Silicon Upon Thin Gate Oxide Integrity
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1 [1991.09.01] Effects of Carbon and Oxygen Impurities in Czochralski Si upon Device Performance and Yield of 1 Mb Dynamic Random Access Memory
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