2011-2015 [2015.06.30] Effect of NH3 Plasma Passivation on the Electrical Characteristics of Nanolaminated ALD HfAlO on InGaAs MOS Capacitor
2021.08.12 14:04
Effect of NH3 Plasma Passivation on the Electrical Characteristics of Nanolaminated ALD HfAlO on InGaAs MOS Capacitor
Jae-Sung Choi and Jea-Gun Park