2011-2015 [2013.05.17] Effect of β-cyclodextrin and Citric Acid on Chemical Mechanical Polishing of Polycrystalline Ge2Sb2Te5 in H2O2 Containing Slurry
2021.08.12 13:42
Effect of β-cyclodextrin and Citric Acid on Chemical Mechanical Polishing of Polycrystalline Ge2Sb2Te5 in H2O2 Containing Slurry
Jong-Young Cho, Hee-Sub Hwang, Sang-Hwa Woo, Jin-Hyung Park, Eung-Rim Hwang, Sung-Goon Kang and Jea-Gun Park