1990-1995 [1993.07.01] Effects of D-Defects in CZ Silicon Upon Thin Gate Oxide Integrity
2019.03.31 11:05
J. -G. Park, S. -P. Choi, G. -S. Lee, Y. -J. Jeong, Y. -S. Kwak, C. -K. Shin, S. Hahn, W. L. Smith, P. Mascher
Effects of D-Defects in CZ Silicon Upon Thin Gate Oxide Integrity
The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2, pp. 289