2006-2010 [2008.09.01] Titanium Dioxide Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition for OLED Passivation
2021.02.27 17:36
Woong-Sun Kim, Myoung-Gyun Ko, Tae-Sub Kim, Sang-Kyun Park, Yeon-Keon Moon, Su-Hwan Lee, Jae-Gun Park and Jong-Wan Park
Titanium Dioxide Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition for OLED Passivation