2006-2010 [2006.10.03] Post-RTA Effect on electrical characteristics of Nano-scale Strained Si Grown on SiGe-on-Insulator n-MOSFET
2020.08.18 18:38
Jea-Gun Park, Tae-Gun Shim, Gon-Sub Lee, Won-Ju Cho and Chang-Geun Ahn
Post-RTA Effect on electrical characteristics of Nano-scale Strained Si Grown on SiGe-on-Insulator n-MOSFET