2001-2005 [2004.08.__] Nature of Surface and Bulk Defects Induced by Epitaxial Layer Growth in Epitaxial Transfer Wafers
2019.05.02 18:02
Suk-Goo Kim, Jea-Gun Park and Un-Gyu Paik
Nature of Surface and Bulk Defects Induced by Epitaxial Layer Growth in Epitaxial Transfer Wafers