2001-2005 [2004.10.__] Extended defects and pile-up of interstitial oxygen in silicon wafer due to MeV-level nitrogen ion implantation
2019.05.02 18:10
Suk-Goo Kim, Ungyu Paik and Jea-Gun Park
Extended defects and pile-up of interstitial oxygen in silicon wafer due to MeV-level nitrogen ion implantation